Drift-Free, 1000 G mechanical shock tolerant single-crystal silicon two-axis MEMS tilting mirrors in a 1000x1000-port optical crossconnect

TitleDrift-Free, 1000 G mechanical shock tolerant single-crystal silicon two-axis MEMS tilting mirrors in a 1000x1000-port optical crossconnect
Publication TypeConference Paper
Year of Publication2003
AuthorsA Gasparyan, H Shea, S Arney, V Aksyuk, ME Simon, F Pardo, HB Chan, J Kim, J Gates, JS Kraus, S Goyal, D Carr, and R Kleiman
Conference NameConference on Optical Fiber Communication, Technical Digest Series
Date Published01/2003
Abstract

We report drift-free two-axis tilting MEMS mirrors fabricated from single crystal silicon. These micromirrors survive 1000 G mechanical shocks and exhibit angular stability better than 4 millidegrees under simulated office vibrations. Two hermetically sealed mirror arrays were used to build a low-loss nonblocking 1000x1000-port optical cross-connect switch.

DOI10.1109/OFC.2003.316014