Optical MEMS devices for telecom systems

As telecom networks increase in complexity there is a need for systems capable of managing numerous optical signals. Many of the channel-manipulation functions can be done more effectively in optical domain. MEMS devices are especially well suited for these applications since they can offer a large number of degrees of freedom in a limited space, thus providing high levels of optical integration. We have designed, fabricated and tested optical MEMS devices at the core of optical cross connects, channelized filters and wavelength-selective switches based on different fabrication technologies such as polysilicon surface micromachining and single crystal SOI. We show specific examples of these devices, discussing design trade-offs between technologies, fabrication requirements and optical performance.